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Lithography & Fab Tools — Basket

Leading-edge semiconductor equipment and subsystem suppliers — EUV lithography (ASML), etch/deposition (Lam, Applied Materials, Tokyo Electron), ALD and epitaxy (ASM International), process control and yield management (KLA), photomasks (Photronics), ion implant (Axcelis), gas/RF delivery (MKS), and parts cleaning (Ultra Clean) — alongside TSMC as the primary foundry beneficiary of the AI-driven front-end capex supercycle.

Constituents (11)

  • ASML HOLDING NV (ASML)
  • TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD (TSM)
  • LAM RESEARCH CORP (LRCX)
  • KLA CORP (KLAC)
  • APPLIED MATERIALS INC /DE (AMAT)
  • MKS INC (MKSI)
  • Ultra Clean Holdings, Inc. (UCTT)
  • AXCELIS TECHNOLOGIES INC (ACLS)
  • PHOTRONICS INC (PLAB)
  • Tokyo Electron Limited (8035.T)
  • ASM International N.V. (ASMI)

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