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Hybrid Bonding Equipment

Direct copper-to-copper bonding without solder microbumps — the next-generation stacking interconnect for HBM5+ and high-end logic-on-logic 3D integration. Enables sub-1µm pitches versus 25-40µm for thermocompression bonding (TCB), allowing 20-Hi+ HBM stacks and TSMC SoIC. Wafer-to-wafer (W2W) hybrid bonding is expected to become mainstream in the HBM5 generation (~2028-2029); die-to-wafer (D2W) for higher mix. Equipment is concentrated at BE Semiconductor (BESI), ASMPT, and Applied Materials, with EV Group and SUSS Microtec on the prep side.

Companies in Hybrid Bonding Equipment (20 shown)

  • APPLIED MATERIALS INC /DE (AMAT)
  • ASM Pacific Technology (ASMPT) (0522.HK)
  • ASMPT (ASM Pacific Technology / ASMPT group) (ASMPT)
  • BE Semiconductor Industries N.V. (BESI)
  • BE Semiconductor Industries N.V. (BESI.AS)
  • Disco Corporation (6146.T)
  • Hanmi Semiconductor Co., Ltd. (042700.KS)
  • KLA CORP (KLAC)
  • KULICKE & SOFFA INDUSTRIES INC (KLIC)
  • LAM RESEARCH CORP (LRCX)
  • ONTO INNOVATION INC. (ONTO)
  • PROTEC (Protec / PROTEC MEMS / regional listing) (053610.KS)
  • Saultech Technology Co., Ltd. (6812.TW)
  • SUSS MicroTec SE (S92)
  • SUSS MicroTec SE (SUSSMICROTEC)
  • SUSS MicroTec SE (SUSS)
  • Tokyo Electron Limited (8035)
  • 台燿 (6274)
  • 均華 (6640)
  • 弘塑 (3131)

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